The PAC200 cryogenic probe station with loader enables fully-automated wafer handling in a cryogenic environment. This reduces cool-down and warm-up time, increases throughput and lowers liquid nitrogen consumption. Carriers with up to three wafer fragments and/or wafers can be prepared independent from the test cycle at cryogenic temperatures.

The PAC200 wafer probe station supports a wide range of challenging applications, including IR-sensor test, radiometric test, DC and RF measurements at cryogenic temperatures. The system can handle wafers up to 300 mm, and support cold filter, cold shutter and selectable f/value aperture as well as multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated. Automatic chip alignment, OCR and wafer mark reading are exclusive features of the system. Cooling options include liquid helium (LHe), liquid nitrogen (LN2) or cryogen-free cooling.

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