The Penn State Nanofabrication Laboratory is located in the Millennium Science Complex. The lab is supported by a dedicated staff and has world-class equipment capabilities in the areas of deposition, etch, lithography, and material modification and characterization.
Did you know?
Cleanroom lab space within the almost 10,000 sq. ft. Nanofabrication Lab is mostly classified Class 1000, with the lithography room as Class 100.
The lab’s unique capabilities enable processing of more than sixty five (65) materials through deposition, and over seventy (70) materials through etch processes, along with substrate flexibility through a number of lithography tools. The suite of tools resident in the facility is testament to the flexibility of the device processing and the staff that supports it.
From the wide variety of available processes, academic and industrial researchers have the ability to develop and fabricate a wide array of novel devices.
For more information or to inquire about Nanofabrication please contact nanofab@psu.edu.
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