More at [ Ссылка ] Nanometer precision is available with a compact linear motor driven by coordinated motion of multiple piezo elements. More at [ Ссылка ]
![](https://i.ytimg.com/vi/V1qlmooyD64/maxresdefault.jpg)
More at [ Ссылка ] Nanometer precision is available with a compact linear motor driven by coordinated motion of multiple piezo elements. More at [ Ссылка ]