Piezo inertia motors [ Ссылка ] allow for the design of extremely small linear stages. The Q-motion series of compact linear stages and rotary stages provides nanometric resolution in minute dimensions. Piezo linear motors are self-clamping, draw no current at rest and generate no heat in steady state, they are also non-magnetic, ideal for high energy physics and medical applications. Stages can provide travel from half inch to several inches.
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